====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     3.E+04 A   Layer # 1- Density = 7.045E22 atoms/cm3 = 5.96 g/cm3
  Layer # 1-  V = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   167.3E+02 A   Straggling =   256.3E+01 A
 Ion Lateral Range =   238.0E+01 A   Straggling =   301.6E+01 A
 Ion Radial  Range =   382.6E+01 A   Straggling =   206.0E+01 A
====================================================================
 Range Skewne- = -001.1599  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 005.0825  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe          V    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
250010.E-03  0.0000E+00  1.4394E+07
500010.E-03  0.0000E+00  1.8760E+07
750010.E-03  0.0000E+00  2.0386E+07
100001.E-02  0.0000E+00  2.6611E+07
125001.E-02  0.0000E+00  2.0514E+07
150001.E-02  0.0000E+00  2.0786E+07
175001.E-02  0.0000E+00  2.3552E+07
200001.E-02  0.0000E+00  2.2091E+07
225001.E-02  4.0000E+02  2.6398E+07
250001.E-02  0.0000E+00  2.9816E+07
275001.E-02  0.0000E+00  2.4880E+07
300001.E-02  4.0000E+02  2.9938E+07
325001.E-02  0.0000E+00  2.7956E+07
350001.E-02  0.0000E+00  2.4187E+07
375001.E-02  0.0000E+00  2.2993E+07
400001.E-02  0.0000E+00  2.8205E+07
425001.E-02  0.0000E+00  2.6858E+07
450001.E-02  0.0000E+00  2.8597E+07
475001.E-02  0.0000E+00  2.7029E+07
500001.E-02  0.0000E+00  2.9662E+07
525001.E-02  4.0000E+02  3.4923E+07
550001.E-02  0.0000E+00  3.1262E+07
575001.E-02  1.2000E+03  3.4896E+07
600001.E-02  0.0000E+00  3.3723E+07
625001.E-02  0.0000E+00  3.5307E+07
650001.E-02  4.0000E+02  4.0461E+07
675001.E-02  0.0000E+00  3.8644E+07
700001.E-02  0.0000E+00  3.6959E+07
725001.E-02  0.0000E+00  4.0187E+07
750001.E-02  4.0000E+02  3.9365E+07
775001.E-02  8.0000E+02  4.4984E+07
800001.E-02  4.0000E+02  4.6797E+07
825001.E-02  8.0000E+02  4.7029E+07
850001.E-02  4.0000E+02  4.3795E+07
875001.E-02  0.0000E+00  4.6248E+07
900001.E-02  1.2000E+03  4.6857E+07
925001.E-02  4.0000E+02  4.5301E+07
950001.E-02  8.0000E+02  5.3067E+07
975001.E-02  0.0000E+00  4.8982E+07
100000.E-01  1.6000E+03  5.1642E+07
102500.E-01  4.0000E+02  5.5502E+07
105000.E-01  8.0000E+02  5.6136E+07
107500.E-01  3.6000E+03  6.1057E+07
110000.E-01  1.6000E+03  5.7518E+07
112500.E-01  8.0000E+02  6.5838E+07
115000.E-01  2.8000E+03  6.4236E+07
117500.E-01  1.2000E+03  6.4524E+07
120000.E-01  2.0000E+03  6.2332E+07
122500.E-01  1.2000E+03  6.8147E+07
125000.E-01  8.0000E+02  6.7700E+07
127500.E-01  2.0000E+03  7.0756E+07
130000.E-01  2.8000E+03  7.7963E+07
132500.E-01  2.0000E+03  8.4717E+07
135000.E-01  5.6000E+03  8.9402E+07
137500.E-01  4.0000E+03  8.7387E+07
140000.E-01  8.0000E+03  8.7899E+07
142500.E-01  4.8000E+03  8.6824E+07
145000.E-01  9.6000E+03  9.7101E+07
147500.E-01  9.2000E+03  1.0013E+08
150000.E-01  8.4000E+03  1.0453E+08
152500.E-01  1.1600E+04  9.8667E+07
155000.E-01  1.0800E+04  1.0517E+08
157500.E-01  1.2000E+04  1.0653E+08
160000.E-01  1.2000E+04  1.1247E+08
162500.E-01  1.6000E+04  9.8312E+07
165000.E-01  1.5200E+04  9.4688E+07
167500.E-01  1.2000E+04  9.2171E+07
170000.E-01  2.2000E+04  1.0029E+08
172500.E-01  1.8400E+04  9.9316E+07
175000.E-01  1.7600E+04  8.2778E+07
177500.E-01  1.7600E+04  7.9122E+07
180000.E-01  1.8800E+04  7.0670E+07
182500.E-01  1.7200E+04  6.3465E+07
185000.E-01  2.0800E+04  6.0195E+07
187500.E-01  1.9600E+04  5.1250E+07
190000.E-01  1.4800E+04  4.1634E+07
192500.E-01  8.8000E+03  3.0573E+07
195000.E-01  1.4000E+04  3.0196E+07
197500.E-01  9.2000E+03  2.2558E+07
200000.E-01  6.4000E+03  1.5269E+07
202500.E-01  7.2000E+03  1.3898E+07
205000.E-01  6.0000E+03  8.7390E+06
207500.E-01  3.6000E+03  6.4443E+06
210000.E-01  3.2000E+03  5.2611E+06
212500.E-01  2.0000E+03  2.8667E+06
215000.E-01  8.0000E+02  1.4240E+06
217500.E-01  8.0000E+02  4.6680E+05
220000.E-01  4.0000E+02  3.0400E+05
222500.E-01  4.0000E+02  1.7720E+05
225000.E-01  0.0000E+00  0.0000E+00
227500.E-01  0.0000E+00  0.0000E+00
230000.E-01  0.0000E+00  0.0000E+00
232500.E-01  0.0000E+00  0.0000E+00
235000.E-01  0.0000E+00  0.0000E+00
237500.E-01  0.0000E+00  0.0000E+00
240000.E-01  0.0000E+00  0.0000E+00
242500.E-01  0.0000E+00  0.0000E+00
245000.E-01  0.0000E+00  0.0000E+00
247500.E-01  0.0000E+00  0.0000E+00
250000.E-01  0.0000E+00  0.0000E+00
